MEMS mikoro

Mikoro ya MEMS muri rusange igizwe na sensor ya microcapacitive ya MEMS, imiyoboro ihinduranya mikorobe, ibyumba bya acoustic, hamwe na RF irwanya interineti.Umutwe wa microcapacitance ya MEMS urimo diaphragm ya silicon na electrode ya silicon inyuma yo kwakira amajwi.Diaphragm ya silicon irashobora kwakira mu buryo butaziguye ibimenyetso byamajwi hanyuma ikohereza mumuzunguruko wa microse ikoresheje sensor ya MEMS micro-capacitance sensor.Umuzunguruko wa micro-uhuza uhindura ibimenyetso byamashanyarazi byihuta cyane kandi byongerewe imbaraga mubyuma byamashanyarazi bidafite imbaraga, byungururwa numuyoboro wa RF urwanya urusaku icyarimwe, kandi bigatanga ikimenyetso cyamashanyarazi gihuye na pre-circuit, " acoustic-amashanyarazi "ihinduka ryarangiye.Binyuze mu gusoma ibimenyetso byamashanyarazi, kumenyekanisha amajwi biragerwaho.